Features of formation of channels during laser treatment of AlN ceramics

Using electron microscopy and X-ray microanalysis, the formation of tracks by laser processing of AlN:Y2O3 ceramic surfaces was investigated. The main process of channel formation is the decomposition of aluminum nitride (AlN). Due to aluminothermic reduction of Y2O3, the metallization of channel surfaces occurs. The main products of ablation are Al2O3, AlN, and AlON.