کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
736598 1461859 2016 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A miniaturized wireless accelerometer with micromachined piezoelectric sensing element
ترجمه فارسی عنوان
شتاب سنج بی سیم مینیاتور با عنصر سنجش پیزوالکتریک
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
چکیده انگلیسی


• A piezoelectric wireless accelerometer for vibration monitoring.
• A micromachined sensing element comprising silicon beams and seismic mass.
• In-plane polarized ferroelectric thin film as the piezoelectric sensing layer.
• A low profile compact package design accommodating all functional modules.
• Appropriate package to eliminate the electromagnetic interference.

A miniaturized wireless accelerometer using a piezoelectric micro sensing element is designed, theoretically analyzed, and demonstrated for remote mechanical vibration monitoring. The micro sensing element comprises a micromachined monolithic silicon seismic mass and multiple silicon beams coated with in-plane polarized (Pb, La)(Zr, Ti)O3 (PLZT) ferroelectric thin film. A low profile compact package is obtained for accommodating all the micro sensing element, charge amplifier and signal processing circuits, radio frequency module, and battery. The electrical output linearly proportional to the vibration acceleration is amplified, digitalized and transmitted to a remote base unit through radio frequency communication. The effects of the device package on the dynamic response of the wireless piezoelectric accelerometer including shielding of ambient interference are investigated.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 241, 15 April 2016, Pages 113–119
نویسندگان
, , , , ,