Multilayered LiNbO3 actuator for XY-stage using a shear piezoelectric effect

LiNbO3 piezoelectric single crystal is expected to have a superior linearity and non-hysteresis. We have already demonstrated these distinguished piezoelectric performances using a Z-stage type LiNbO3 multilayered actuator. In this study, a XY-stage type actuator was fabricated. By optimizing the cutting angle (163° Y-cut), the shear piezoelectric constant becomes as large as 66 pC/N, and the multilayered structure enables larger piezoelectric displacement and the effective piezoelectric coefficient becomes compatible to PZT. To realize the ultra-high precise positioning system, a multilayered LiNbO3 actuator (multilayered number 10) was fabricated to examine the piezoelectric vibration and its linearity. By investigating the relationship between applied voltage and the piezoelectric displacement, it was confirmed that this actuator has excellent linearity and non-hysteresis. The effective piezoelectric constant was calculated to 660 pC/N and obtained maximum displacement was 64.5 nm with 100 V, corresponding to 645 pC/N.