Development of a gas detection micro-device for hydrogen fluoride vapours

This research concentrates on the sensitivity of a tin dioxide-based gas sensor semiconductor with respect to hydrogen fluoride in the atmosphere. This paper is focused on the development of a separation micro-system, which will be positioned in front of the gas sensor, for the potential use in a complex atmosphere. This study deals with the use of traditional techniques of micro-machining on silicon substrates to manufacture chromatographic micro-columns. The manufacture of the micro-channels and formulation of the stationary phase are discussed. Infrared spectroscopy allows following the evolution of the stationary phase with respect to time. We evaluate the thickness of the stationary phase deposited on the GC micro-channel's internal walls close to the micrometer. A solvent extraction test was performed in order to illustrate the use of the device considered.