Multi-Subband Monte Carlo simulations of ION degradation due to fin thickness fluctuations in FinFETs

We found that the impact of channel thickness discontinuity on the on-current is larger when the nonuniformities are located close to the Virtual Source of the device. Furthermore, the sensitivity of the on-current to thickness nonuniformity is essentially the same when considering devices with different crystal orientations. Comparison with drift-diffusion simulations reveals substantial differences in the predicted trends of the sensitivity of the drain current to thickness fluctuations in these nanoscale devices.