Thickness effects of yttria-doped ceria interlayers on solid oxide fuel cells

► Yttria-doped ceria interlayers are fabricated by atomic layer deposition. ► The completeness of YDC films with various ALD super cycles is studied through electroanalysis. ► Auger elemental mapping and X-ray photoelectron spectroscopy are used to verify the film coverage. ► The effect of the optimal YDC interlayer in micro fuel cells is presented.