Fabrication of large-scale multilevel phase-type Fresnel zone plate arrays by femtosecond laser direct writing

We report on the fabrication of large-scale eight-level phase-type Fresnel zone plate arrays (FZPAs) by femtosecond-laser direct writing technology. A high-speed galvanometer scanning system was used to fabricate each Fresnel zone plate to realize high fabrication efficiency. To overcome the limited fabrication scale in the case of galvanometer scanning, inter-plate movements were controlled by multi-axis air-bearing precise positioning stages. With the system, FZPAs whose fill-factor was designed to be 100% realized a diffraction efficiency of 89%. The focusing and imaging properties of the FZPAs were also evaluated, and the FZPAs showed high fidelity.