Synthesis by aerosol assisted chemical vapor deposition and microstructural characterization of PbTiO3 thin films

► We report the synthesis of homogeneous PbTiO3 thin films on Si substrates. ► They were synthesized by aerosol assisted chemical vapor deposition method. ► Detailed characterization by X-ray diffraction and electron microscopy was performed. ► Crystalline structure of PbTiO3 films corresponded to a tetragonal perovskite-type. ► The fiber texture representation had a Gaussian (1, 1, 0) component.