کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812934 | 1518122 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structures and mechanical properties of diamond like carbon films prepared by closed-field unbalanced magnetron sputtering
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Diamond like carbon (DLC) films were synthesized by closed-field unbalanced magnetron sputtering (CFUBM) using carbon targets in Ar and Ar/C2H2 atmosphere. The deposition rate, structure and mechanical properties of these films were studied as a function of applied bias voltage on the substrate during deposition. The film structures were investigated using Raman spectroscopy. The hardness and elastic modulus were measured by nano-indentation tests and the friction coefficient of DLC films was measured by a ball-on-disc type wear tester. Raman analysis showed that sp3/sp2 ratio in DLC films changed with increasing substrate bias voltage. Hydrogenated DLC films deposited at the bias of â200 V exhibited a maximum hardness of 28 GPa and a relatively low friction coefficient of about 0.1.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 475, Issues 1â2, 22 March 2005, Pages 303-307
Journal: Thin Solid Films - Volume 475, Issues 1â2, 22 March 2005, Pages 303-307
نویسندگان
Hyun S. Myung, Yong S. Park, Jae W. Lee, B. Hong, Jeon G. Han,