کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9952749 | 1461820 | 2018 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of a micromachined accelerometer for particle acceleration detection
ترجمه فارسی عنوان
توسعه یک شتاب سنج میکرو تراش برای تشخیص شتاب ذرات
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
We are reporting on the design, fabrication, and experimental results for a micromachiend accelerometer that is intended to be used in the detection of acoustic signals, where the main requirements include low noise, wide bandwidth, and high linearity. The device design requirements are discussed and analytically modelled. Microfabrication details to build prototypes are provided in detail. The final device structure employs membrane as the suspension mechanism and a proof-mass made from the entire thickness of a wafer that is suspended above a fixed electrode. The proposed manufacturing process allows for precise and independent control of the structural components of the device and the capacitive gap. Prototype devices were fabricated and characterized. Measurements on the device performance demonstrate a 0.6μg/Hz noise floor with resonance frequency of 5.2âkHz, sensitivity of â¼0.9âpF/g, and open-loop dynamic range of higher than 145âdB while operating at atmospheric pressure. The device meets the requirements for measuring sonar signals in the range of 50âHz to 5âkHz under low environmental noise conditions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 280, 1 September 2018, Pages 359-367
Journal: Sensors and Actuators A: Physical - Volume 280, 1 September 2018, Pages 359-367
نویسندگان
Fatemeh Edalatfar, Bahareh Yaghootkar, Abdul Qader Ahsan Qureshi, Soheil Azimi, Albert Leung, Behraad Bahreyni,