Electron distribution on a tilted sample in the high pressure SEM

The effect of the specimen inclination on the electron distribution at the specimen surface in an HPSEM was investigated by Monte Carlo simulation. A broadening of the electron profile versus the tilt angle was obtained and a relationship between the r0.9 radius and this tilt angle is proposed. The plot of the electron distribution at the sample surface shows that the classical scattering profile in the standard conditions is modified so that an inclined truncated shape is obtained. This result confirms the difficulty to carry out X-ray microanalysis in low vacuum conditions.