Structural, electrical and mechanical properties of magnetron sputtered NiTi/PZT/TiOx thin film heterostructures

► In-situ growth of NiTi/PZT/TiOx heterostructure on Pt/Ti/SiO2/Si substrates. ► The heterostructure exhibited the properties of both SMA and PZT. ► Varying thickness of NiTi films had a significant influence on properties of heterostructure. ► The incorporation of additional TiOx buffer layer improves the dielectric properties.