کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10998076 1388449 2019 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Optical TiO2 layers deposited on polymer substrates by the Gas Injection Magnetron Sputtering technique
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Optical TiO2 layers deposited on polymer substrates by the Gas Injection Magnetron Sputtering technique
چکیده انگلیسی
This work presents decorative TiO2, TiO2/Al layers deposited on poly(methyl methacrylate) (PMMA) substrates. We chose the Gas Injection Magnetron Sputtering (GIMS) technique for layer deposition. Choosing this technique, we expected a lower thermal load of polymer substrate than in other commonly used magnetron techniques. The pulse plasma, generated in the GIMS method, is controlled by a periodical injection of gas dosages in the region of the magnetron target. The process of deposition operated with a 1 Hz frequency of a plasma generation and the life time of plasma was ∼500 ms. Under these conditions, the energetic impact into the substrate, integrated over the time, is lower than during the continuous process, so it should not cause any damage to the polymer surface. For our experiment we deposited a thick ∼700 nm aluminum layer and thin 17-116 nm TiO2 films, which exhibited the interference effect, on non - heated PMMA substrates. The optical properties of the prepared systems were investigated by spectroscopic ellipsometry and spectrophotometric measurements.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 466, 1 February 2019, Pages 12-18
نویسندگان
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