کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1475926 | 991135 | 2008 | 7 صفحه PDF | دانلود رایگان |
In this work, electrohydrodynamic atomization was used to spray deposit lead zirconate titanate (PZT) thick films using a PZT composite sol–gel slurry. During atomization splats and clusters were generated from jet break-up. The influence of atomization–substrate distance on the characteristics of splats and clusters was analysed. At a greater distance dried clusters were predominant, which led to the formation of porous films; conversely, at a smaller distance wet splats dominated, which generated dense films. A distance of 10 mm was found to be the optimum deposition distance for this slurry to produce dense films. 28 μm thick PZT crack-free films were produced by depositing 60 layers of slurry using this technique. The resulting films had a homogenous microstructure and exhibited a relative permittivity of ∼ 220 and d33, f of ∼71 pC N−1.
Journal: Journal of the European Ceramic Society - Volume 28, Issue 14, October 2008, Pages 2739–2745