کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1486833 1398271 2016 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication and characterization of PZT string based MEMS devices
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Fabrication and characterization of PZT string based MEMS devices
چکیده انگلیسی

String based MEMS devices recently attract world technology development thanks to their advantages over cantilever ones. Approaching to this direction, the paper reports on the micro-fabrication and characterization of free-standing doubly clamped piezoelectric beams based on heterostructures of Pd/FeNi/Pd/PZT/LSMO/STO/Si. The displacement of strings is investigated in both static and dynamic mode. The static response exhibits a bending displacement as large as 1.2 μm, whereas the dynamic response shows a strong resonance with a high quality factor of around 35 depending on the resonant mode at atmospheric pressure. These findings are comparable with those observed in large dimension membrane and cantilever based MEMS devices, which exhibit high potentials in variety of sensor and resonant actuator applications.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Science: Advanced Materials and Devices - Volume 1, Issue 2, June 2016, Pages 214–219
نویسندگان
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