Phase composition and tribological performance of molybdenum nitride coatings synthesized by IBAD

►High energy ion bombardment is necessary to form single MoN phase. ►MoN is superior to Mo2N both in oxidation resistance and mechanical properties. ►The MoO3 phase by oxidation treated MoN is not a lubricant. ►The lubricious phase should be a molybdenum oxide with lower stoichiometric ratio of oxygen.