کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1662023 1008435 2007 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Near cathode optical emission spectroscopy in N2–H2 glow discharge plasma
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Near cathode optical emission spectroscopy in N2–H2 glow discharge plasma
چکیده انگلیسی

Optical emission spectroscopy (OES) is a non-intrusive diagnostic technique, widely used to study different kinds of plasmas. In the present work, a locally resolved OES technique was used to obtain near cathode (substrate) emission spectra for N2–H2 glow discharges. It was observed that, along with N2+ and N2 lines, the characteristic atomic nitrogen lines at 742.3 nm (3p 4S03/2 → 3s 4P1/2), 744.2 nm (3p 4S03/2 → 3s 4P3/2), 746.8 nm (3p 4S03/2 → 3s 4P5/2) and Hα (656.3 nm) were the main emissions coming from the sheath region that shrouded the cathode. A qualitative analysis of the spectral lines near the cathode has been done in order to understand the mechanism of plasma nitriding and the role played by the hydrogen in the nitriding process. The decrease in local intensity of these atomic lines with hydrogen composition suggests that the effect of hydrogen is to enhance the sticking/adsorption of N on the cathode surface.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 202, Issue 2, 25 November 2007, Pages 301–309
نویسندگان
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