Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy

Interaction between hydrogen plasma and hydrogenated amorphous carbon films was investigated. The changes in the bonding configuration of the hydrocarbon species due to the hydrogen plasma treatments were investigated by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). Further, to reinforce the results, etching rates were also investigated. These results suggested that the hydrogen ions generated in the plasma physically etched the amorphous carbon film at the high rate; on the other hand, the hydrogen radicals also etched the hydrogenated film at the low rate through hydrogenation of the film.