کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1676904 | 1518093 | 2006 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Enhanced Si and B diffusion in semiconductor-grade SiO2 and the effect of strain on diffusion
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We present experimental and simulation results of Si self-diffusion and B diffusion in SiO2 formed directly on Si substrates by thermal oxidation. We show that both Si and B diffusion in SiO2 are enhanced by SiO generated at the Si/SiO2 interface and diffusing into SiO2. We also show that the existence of high-concentration B in SiO2 enhances SiO diffusion, which enhances both Si self-diffusion and B diffusion. This correlated diffusion of Si and B in SiO2 is consistent with the first-principles calculation results, which show that B diffuses via a complex of BSiO with frequent bond exchanges in the SiO2 network. Furthermore, based on the results, the enhancement of Si self-diffusion and B diffusion in SiO2 by compressive strain and their retardation by tensile strain are suggested.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 508, Issues 1â2, 5 June 2006, Pages 270-275
Journal: Thin Solid Films - Volume 508, Issues 1â2, 5 June 2006, Pages 270-275
نویسندگان
Masashi Uematsu, Hiroyuki Kageshima, Shigeto Fukatsu, Kohei M. Itoh, Kenji Shiraishi, Minoru Otani, Atsushi Oshiyama,