Monte Carlo study of ion-induced secondary electron emission from SiO2

Here we describe a recently developed direct Monte Carlo program to study kinetic electron emission from SiO2 target. The program includes excitation of the target electrons (by projectile ions, recoiling target atoms and fast primary electrons), subsequent transport and escape of these electrons from the target surface. The program can be used to calculate the electron yields, distribution of electron excitation points in the target and other physical parameters of the emitted electrons. In order to demonstrate the capabilities of this program, we report a study on the kinetic electron emission from SiO2 induced by fast (1-10 keV) rare gas ions. The calculated kinetic electron yield for various ion energies and masses is in good agreement with the predictions of most frequently applied theoretical model. In addition, the effects of projectile energy, mass and impact angle on the depth distribution of electron excitation points and average escape depth of the outgoing electrons were investigated. It is important to mention that the existing experimental techniques are not capable to measure these parameters.