کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
4970920 1450305 2017 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Quantitative AC - Kelvin Probe Force Microscopy
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Quantitative AC - Kelvin Probe Force Microscopy
چکیده انگلیسی

This paper presents a novel feedback based Scanning Probe Microscopy method which enables quantitative surface potential measurements without the need of the DC bias of Kelvin Probe Force Microscopy. In addition to the sinusoidal excitation signal at frequency ω, a sinusoidal signal with the frequency 2ω is applied to the conductive cantilever. By modulating the amplitude of the signal at 2ω, the resulting electric force component at the frequency ω can be nullified by a feedback controller. When the force and, hence, the cantilever oscillation is zero, the required amplitude represents the quantitative surface potential. Recording this amplitude while scanning over the sample allows to acquire a two dimensional map of the surface potential. The AC-KPFM method, shown analytically and with experimental results, keeps the compensation based principle of classical KPFM, resulting in quantitative measurements but without the need of a DC bias.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 176, 25 May 2017, Pages 28-32
نویسندگان
, , ,