Controlled synthesis of transition metal dichalcogenide thin films for electronic applications

- Controlled and scalable growth of 2D transition metal dichalcogenide thin films by vapour phase sulfurisation of predeposited metal films is demonstrated.
- These films are characterised thoroughly with assorted forms of spectroscopy and electron microscopy, evidencing their high quality.
- A simple integration scheme, based on complementary shadow masks, is proposed for the production of electronic devices from these films.
- A NH3 sensor, with a sensitivity of 400 ppb, is demonstrated.