Investigation of humidity-dependent nanotribology behaviors of Si(1Â 0Â 0)/SiO2 pair moving from stick to slip

▸ The effect of humidity on the motion behavior of Si(1 0 0)/SiO2 pair was clarified. ▸ With increase in humidity, adhesion force increases slowly firstly, then sharply. ▸ With increase in humidity, friction force increases sharply firstly, then slowly. ▸ The wear degree of Si is relative to the physical state of absorbed water film. ▸ The tribochemical reaction of Si(1 0 0) in humid air was verified by ToF-SIMS.