Nanostructuring of Ta2O5 surfaces by low energy Ar+ bombardment

- Ar+ bombardment of Ta2O5 surfaces leads to the formation of an altered layer where the composition is different from that of the bulk.
- Ar+ bombardment of Ta2O5 surfaces leads to the formation of short-range hexagonal order nanostructures.
- The height of the nanostructures is equal to the thickness of the altered layer produced during bombardment.
- There is a close relationship between the nanostructuring of the surface and the altered layer formed during bombardment.