UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer

- Time-dependent UV/ozone treatment increases hydrophilicity of the SU-8 film without affecting the surface roughness.
- Carboxylic groups created on a surface after UV/ozone activation can be used to bind molecules via amide bond.
- Immobilized molecules are accessible for further reactions or subsequent interactions with macromolecules.