کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5358780 | 1388238 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of three-dimensional substrates for Li microbatteries on Si
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
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چکیده انگلیسی
Lithographic techniques for patterning planar substrates to achieve microbattery materials compatible three-dimensional (3D) Ni substrates for sequential deposition of active battery materials are described. A single spin negative photoresist is used to achieve 100 μm pattern heights. After patterning, Ni is electroplated on the substrates from a low stress Ni sulphamate bath to a maximum of 100 μm. The sidewall angle achieved yields a thinner Ni feature at the surface level than at the base which is a key parameter to facilitate subsequent active battery materials deposition by vacuum deposition techniques. An aspect ratio of 1.5:1 has been achieved and the surface area is increased by comparison with planar electrodes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 3, Supplement, 15 November 2009, Pages S61-S64
Journal: Applied Surface Science - Volume 256, Issue 3, Supplement, 15 November 2009, Pages S61-S64
نویسندگان
Arockia Vimal Jeyaseelan, James F. Rohan,