Fabrication of micro/nano fluidic system combining hybrid mask-mould lithography with thermal bonding

Polymer-based micro/nano fluidic system is becoming indispensable for biological applications as well as physical chemistry research. In this article, we demonstrate a novel fabrication process for nano fluidic system based on hybrid mask-mould (HMM) lithography and thermal bonding using SU-8. With the HMM lithography, the protrusions of channels and reservoir patterns can be replicated in one step. Bonding process conditions are flexible and easily controllable with the use of PET substrate and the thin adhesive layer. Surface textures were found to be essential to the bonding strength and channel profile control. The fabricated fluidic system was characterized using spontaneous capillary filling with dyed water, demonstrating good quality of sealing.