کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
540410 871311 2011 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Hybrid porous resist with sensing functionality
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Hybrid porous resist with sensing functionality
چکیده انگلیسی

Natively porous hybrid organic–inorganic sol–gel systems have been engineered to be used as functional positive photoresists, aimed to the realization of microsensors in a single-step process.Interesting results have been obtained combing three main sol–gel system features: the direct patternability through X-ray lithography, being processable without the addition of a photocatalyst; the functionalizability, properly designing the organic component of the hybrid network or incorporating active species; the open micro or mesoporosity, tailored by the synthesis process and precursor choice.The photoprocessable porous films have been synthesized starting from a Bridged Polysilsesquioxane (BPS) precursor, 1,4-bis(triethoxysilyl)benzene. The correlation between chemical properties of the sol–gel material and its patternability is described in detail. X-ray exposure leads to a progressive alkyl and aromatic compound elimination and promotes inorganic condensation in the system, allowing the selective dissolution of irradiated cross-linked films in suitable etchants. Patterns of final resolution lower than 100 nm have been realized on BPS-based films synthesized in acid conditions, a procedure that allows to take advantage of a straightforward embedding protocol for active species in the sol–gel matrix. The BPS-based system has been doped with a covalently linked quinolinium dye, obtaining thin sensing films patternable by X-ray lithography. A feasibility test for the fabrication of optical microdevices, where fluorescence properties are obtained directly on the patterned coatings, has been provided.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 88, Issue 8, August 2011, Pages 1913–1916
نویسندگان
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