کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5423165 | 1507952 | 2010 | 18 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Band diagram for chemical vapor deposition diamond surface conductive layer: Presence of downward band bending due to shallow acceptors
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کلمات کلیدی
EDCSBDSTDCNLNCAdiamond - الماسSurface transfer doping - دوپینگ انتقال سطحChemical vapor deposition - رسوب بخار شیمیایی یا انباشت به روش تبخیر شیمیاییCharge neutrality level - سطح بیطرفی را شارژ کنیدElectron spectroscopy - طیف سنج الکترونیPhotoemission electron microscopy - میکروسکوپ الکترونی PhotemissionEnergy band diagram - نمودار باند انرژیSurface conductivity - هدایت سطح
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The properties of surface conductivity (SC) of impurity-non-doped CVD diamond (001) samples were studied by various methods of sheet-resistance (RS) measurement, Hall-effect measurement, XPS, UPS, SES, SR-PES, PEEM and 1D band simulation taking into account special emphases on deriving the information about the surface band diagram (SBD). The RS values in UHV conditions were determined after no-annealing or 200 â¼Â 300 °C annealing in UHV. C 1 s XPS profiles were measured in detail in bulk-sensitive and surface-sensitive modes of photoelectron detection. The energy positions of valence band top (EV) relative to the Fermi level (EF) in UHV conditions after no-annealing or 200 â¼Â 300 °C annealing in UHV were determined. One of the samples was subjected to SR-PES, PEEM measurements. The SBDs were simulated by a band simulator from the determined RS and EV â EF values for three samples based on the two models of surface conductivity, namely, so-called surface transfer doping (STD) model and downward band bending with shallow acceptor (DBB/SA) model. For the DBB/SA model, there appeared downward bends of SBDs toward the surface at a depth range of â¼Â 1 nm. C 1 s XPS profiles were then simulated from the simulated SBDs. Comparison of simulated C 1 s XPS profiles to the experimental ones showed that DBB/SA model reproduces the C 1 s XPS profiles properly. PEEM observation of a sample can be explained by the SBD based on the DBB/SA model. Mechanism of SC of CVD diamonds is discussed on the basis of these findings. It is suggested that the STD model combined with SBD of DBB/SA model explains the surface conductivity change due to environmental changes in actual cases of CVD diamond SC with the presence of surface EF controlling defects.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 604, Issues 13â14, 15 July 2010, Pages 1148-1165
Journal: Surface Science - Volume 604, Issues 13â14, 15 July 2010, Pages 1148-1165
نویسندگان
S. Kono, T. Saito, S.H. Kang, W.Y. Jung, B.Y. Kim, H. Kawata, T. Goto, Y. Kakefuda, H.W. Yeom,