کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5425101 | 1395847 | 2008 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Applicability of magic angle for angle-resolved X-ray photoelectron spectroscopy of corrugated SiO2/Si surfaces: Monte Carlo calculations
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In several earlier works, the “magic angle” has been introduced in overlayer thickness estimation from angle-resolved X-ray photoelectron spectra as a practical tool for suppressing experimental errors induced by surface corrugation. We analyse the applicability of the “magic angle” in Monte Carlo calculations of random as well as non-random corrugated silicon surfaces covered by thin silicon dioxide films, accounting for (a) electron inelastic and elastic scattering events, (b) the shadowing of photoelectrons, and (c) the differences between microscopic and macroscopic electron emission geometry. It is shown that the “magic angle” value varies with the type of surface roughness, overlayer thickness, surface contamination, an uneven overlayer thickness and electron inelastic surface excitations.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 602, Issue 14, 15 July 2008, Pages 2581-2586
Journal: Surface Science - Volume 602, Issue 14, 15 July 2008, Pages 2581-2586
نویسندگان
K. Olejnik, J. Zemek,