Investigation on the layout parameters of on-chip inductor

A comprehensive discussion on the layout parameters of spiral inductor is addressed in this paper. By keeping the identical DC resistance, the variations of metal width, coil number, and metal spacing influence the RF resistance are investigated completely. Then the mechanism of induced eddy current is described to explain the influence in the design of layout parameters. Finally, the experimental result of special layout (i.e. taper inductor) is demonstrated the improved Q characteristics.