Al base metal-CCL using polyimide/Al2O3 layers for LED lighting thermal substrates

The Al base metal-CCLs for LED lighting thermal substrates were coated with several thicknesses of polyimide (PI) by spin-coating, and barrier type anodic aluminum oxide (AAO) was about 200 nm coated, between Al substrate and PI by anodizing. PI was treated with surface treatment by O2 plasma depending on the O2 plasma power before Cu coating. Cu was about 200 nm coated on PI surface by sputtering. The Al base metal-CCLs were analyzed in terms of volume resistivity, thermal conductivity, break-down voltage and peel strength depending on the thickness of the PI. Also, the comparison was made between the four properties of Al/PI/Cu metal-CCLs and those of Al/Al2O3/PI/Cu metal-CCLs. Finally, using a simulation model their performances were compared with fabricated metal-CCLs, and the following discussions were centered on the relationship between thermal conductivity and other properties.

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