Electrodepositing amorphous Ni-W alloys for MEMS

The wearing resistance and corrosion resistance of Ni-W alloy films is more excellent than that of Ni film. As a contrast, wearing resistance and corrosion resistance of Ni and NiW films are investigated in this paper. The results show that electrodeposited amorphous Ni-W alloy films have good wearing resistance and excellent corrosion resistance compared with electrodeposited Ni films. Moreover, the Ni-W alloy films still had good properties after heat treatment. The good wearing resistance and corrosion resistance of amorphous Ni-W alloy films are associated with crystal structure. The micro-spinneret is fabricated successfully with amorphous Ni-W alloys by UV-LIGA technology.