کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
543426 | 1450394 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth, ambient stability and electrical characterisation of MgO thin films on silicon surfaces
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
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چکیده انگلیسی
Magnesium oxide (MgO) thin films were deposited onto silicon substrates, from an MgO target, by electron beam evaporation. The ambient stability of the MgO films and the formation of the MgO/Si interface were analysed using standard X-ray photoelectron spectroscopy (XPS) and high resolution synchrotron radiation based photoemission. Ambient exposure of the deposited films results in the growth of magnesium hydroxide and magnesium carbide species which can be desorbed by annealing at 500 °C in an inert atmosphere. Electrical characterisation has been performed on nickel silicide/MgO/Si(1 0 0) MOS structures for different dielectric thicknesses. The C–V results show no evidence of a low-k layer at the MgO/Si interface.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 86, Issues 7–9, July–September 2009, Pages 1711–1714
Journal: Microelectronic Engineering - Volume 86, Issues 7–9, July–September 2009, Pages 1711–1714
نویسندگان
P. Casey, E. O’Connor, R. Long, B. Brennan, S.A. Krasnikov, D. O’Connell, P.K. Hurley, G. Hughes,