High-performance optical waveguide devices using 300 mm Si photonics platform

• The Si photonics platform for 300 mm SOI wafers has been built up.
• The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for waveguides.
• The 50 × 50 mm2 large Si interposers have been demonstrated.
• This platform is useful for performance enhancement on the optical integrated circuit

The Si photonics platform for 300 mm SOI wafers has been built up for optical multi-applications. The performance of main optical waveguide devices has been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for 220 nm-thick single-mode waveguides with TE-polarization. MMI coupler, AWG and WDM filter showed superior performance for their applications. The 50 × 50 mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications.

Figure optionsDownload full-