کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
544147 1450325 2016 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
High-performance optical waveguide devices using 300 mm Si photonics platform
ترجمه فارسی عنوان
دستگاه های موجبر نوری با عملکرد بالا با استفاده از پلت فرم فوتونیک سی 300 میلی متری
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
چکیده انگلیسی


• The Si photonics platform for 300 mm SOI wafers has been built up.
• The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for waveguides.
• The 50 × 50 mm2 large Si interposers have been demonstrated.
• This platform is useful for performance enhancement on the optical integrated circuit

The Si photonics platform for 300 mm SOI wafers has been built up for optical multi-applications. The performance of main optical waveguide devices has been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for 220 nm-thick single-mode waveguides with TE-polarization. MMI coupler, AWG and WDM filter showed superior performance for their applications. The 50 × 50 mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications.

Figure optionsDownload full-

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 156, 20 April 2016, Pages 55–58
نویسندگان
, , , , , ,