کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
544147 | 1450325 | 2016 | 4 صفحه PDF | دانلود رایگان |
• The Si photonics platform for 300 mm SOI wafers has been built up.
• The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for waveguides.
• The 50 × 50 mm2 large Si interposers have been demonstrated.
• This platform is useful for performance enhancement on the optical integrated circuit
The Si photonics platform for 300 mm SOI wafers has been built up for optical multi-applications. The performance of main optical waveguide devices has been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for 220 nm-thick single-mode waveguides with TE-polarization. MMI coupler, AWG and WDM filter showed superior performance for their applications. The 50 × 50 mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications.
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Journal: Microelectronic Engineering - Volume 156, 20 April 2016, Pages 55–58