Enhanced mechanical properties of the high-resolution EUVL patterns of hybrid photoresists containing hexafluoroantimonate

Enhanced mechanical properties of the high-resolution EUVL patterns of hybrid photoresists containing hexafluoroantimonate

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 194, 5 July 2018, Pages 100-108

Pawan Kumar, Pulikanti Guruprasad Reddy, Satinder K. Sharma, Subrata Ghosh, Chullikkattil P. Pradeep, Kenneth E. Gonsalves,