Effects of annealing technique and TiO2 seed layer on the phase composition of 0.7Pb(Mg1/3Nb2/3)O3–0.3PbTiO3 film

The lead magnesium niobate–lead titanate (PMN–PT) thin films with and without the TiO2 seed layer were prepared by a pulsed laser deposition (PLD) deposited on Pt/Ti/SiO2/Si substrates. The films were treated by two-step annealing and normal annealing with rapid thermal annealing (RTA). The effects of two-step annealing and the TiO2 seed layer on the phase composition of PMN–PT films were studied. The results show that the PMN–PT film with TiO2 seed layer can gain a pure perovskite phase with a high (1 0 0) preferential orientation after the two-step annealing technique.

► TiO2 as the seed layer.
► PMN–PT films were treated by the two-step annealing.
► The enhanced property of PMN–PT films result from the formation of film texture.