New carbon nanotubes growth process in a closed microfabricated channel for liquid chromatography application

The present paper describes a new process for the production of chromatographic columns made out of silicon, containing a micropillar array nanostructured with carbon nanotubes, and suitable for use in the reversed phase mode. According to this original collective process, a nickel layer sputtered on the whole wafer is used at the same time to realize the bonding process of the silicon cap cover, as well as to catalyze the carbon nanotubes growth on the sidewalls of the micropillars in the closed microsystem. The development of the bonding process via the formation of nickel silicide and the optimization of the growth of a homogenous layer of carbon nanotubes along the channel length are described. Preliminary chromatographic experiments with a mixture of two amines demonstrate the possibility to implement, in the hydrodynamic pumping mode, reproducible and efficient chromatographic separations with such a carbon nanotubes based stationary phase.