Evaluation of nanoindentation load-depth curve of MEMS bridge structures by calculating the critical elastic-plastic bending deflections

Evaluation of nanoindentation load-depth curve of MEMS bridge structures by calculating the critical elastic-plastic bending deflections

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 434, 15 March 2018, Pages 1-10

Zhichao Ma, Hongwei Zhao, Xijie Du, Mingxing Zhou, Xiaoxi Ma, Changyi Liu, Luquan Ren,