Out-of-plane and In-plane piezoelectric behaviors of [Ba(Zr0.2Ti0.8)O3]-0.5(Ba0.7Ca0.3TiO3) thin films

The piezoelectric properties of [Ba(Zr0.2Ti0.8)O3]-0.5(Ba0.7Ca0.3TiO3) (abbreviated as BZT-0.5BCT) thin films deposited on Pt/Ti/SiO2/Si substrates are reported in the present investigation. The effect of the distances between the target and substrate (d) on the morphology and out-of-plane piezoelectric properties was investigated. The experimental results showed that the ferroelectric domains size was dependent on the distance between the substrate and target and the ferroelectric domain growth was constrained by the grains. The samples exhibited well-defined out-of-plane butterfly loops and hysteresis loops and the one with d of 6.5 cm possessed the optimal ferroelectric properties and it exhibited good in-plane piezoelectric properties.