Normal impact of adhesive microparticles with a film/substrate system: A numerical study

► We study the normal impact of microparticles with a thin film/substrate system. ► Interfacial adhesion property is implemented by nonlinear spring elements. ► Adhesion hysteresis effect is accounted for by a piecewise-linear cohesive law. ► Restitution coefficient of particles can be regulated by a soft coating. ► This study helps the optimal design of particle impaction or filtration systems.