کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7986854 1515163 2013 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Computational investigation of electron path inside SEM chamber in mirror effect phenomenon
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد دانش مواد (عمومی)
پیش نمایش صفحه اول مقاله
Computational investigation of electron path inside SEM chamber in mirror effect phenomenon
چکیده انگلیسی
Present work aims at describe the behaviour of an accelerated probing electron that orientated towards a charged insulator sample and hence producing mirror images. The distribution of the trapped charges at the sample surface is approximated as a point charge. Hence, analytical derivation for the path equation of this electron has been presented. The derived model expresses the probing electron path in terms of the scanning potential, incident angle, trapped charges and the sample relative permittivity. Some of experimental data are import from published literatures so as to justify the introduced procedure. The obtained results have shown that important information could be predictable through the use of this procedure. Hence this procedure may be considered as a tool for describing, analysing and providing hints for further investigation of electron mirror images.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Micron - Volume 51, August 2013, Pages 13-20
نویسندگان
, ,