Skirting effects in the variable pressure scanning electron microscope: Limitations and improvements

► New approach to improve the spatial lateral resolution of the X-ray microanalysis and the backscattered electrons modes in variable pressure or environmental scanning electron microscope (VP-ESEM). ► Correlation between two concepts: the electron beam skirt radius and the generation volume radius of signals in the material. ► The existence of the best lateral resolution conditions named R (P, E) depending on the pressure and the energy for each material.