Is it possible to measure diameters of metal nanoparticles using BSE imaging in FESEM?

► BSE Autrata YAG detector is able to measure Pd particles with a diameter over 8 nm. ► The accuracy of Au and Pd nanoparticle measurements in TEM and FESEM was comparable. ► The accuracy of nanoparticle measurements is influenced by the size dispersion. ► Pd nanoparticles differing in size by 10 nm are distinguishable in BSE mode of FESEM.