A flexure-based electromagnetic nanopositioning actuator with predictable and re-configurable open-loop positioning resolution

• A electromagnetic actuator with a few millimeters stroke range and nanometric positioning resolution.
• An accurate thermal model for the electromagnetic module.
• A semi-analytic modeling approach that analyze the stiffness of the flexure-based bearings.
• Demonstrates an unique characteristic, i.e., predictable and re-configurable open-loop positioning resolution.

This paper presents a novel cylindrical-shaped Flexure-based Electromagnetic Linear Actuator (FELA) that exhibits predictable and re-configurable open-loop positioning resolution. By combining contactless Lorentz-force actuation and frictionless flexure-based supporting bearings, it produces high repeatable motion and sub-micron positioning resolution. In this paper, the design concept of this cylindrical-shaped FELA will be introduced. It focuses on the modeling of the flexure-based supporting bearings, the thermal modeling of the electromagnetic module, and the unique characteristics of FELA, i.e., predictable and re-configurable open-loop positioning resolution. A prototype was developed to evaluate the performance and demonstrate these unique characteristics of this new class of nanopositioning actuator.