Structural and tribological properties of diamond-like nanocomposite thin films

► Mixed siloxane and silazane precursor (MSSP) based DLN films are produced by rf-PECVD. ► The structural and tribological properties of these films are discussed. ► Surface roughness, friction coefficient, elastic modulus, hardness, etc. are modified. ► Varying combinations of precursors, we can control the film properties.