Effects of CF4 plasma treatment on the moisture uptake, diffusion, and WVTR of poly(ethylene terephthalate) flexible films

► CF4 plasma treated-PET on moisture uptake, diffusion, and WVTR was studied. ► Moisture uptake reduces due to hydrophobic surface and denser fluorinated top-layer. ► Fluorinated layer has a WVTR of ~ 10−4 g/m2/day based on a series resistance model.