Femtosecond laser modification of multilayered TiAlN/TiN coating

► Modification of PVD multilayered TiAlN/TiN coating by femtosecond laser pulses. ► A FIB/SEM system was applied for cross sectional analysis of the features generated. ► The damage threshold (0.66 J cm− 2) and the incubation parameter (0.642) were found. ► Laser induced parallel surface structures with a periodicity of about 580 nm were found.