Dome-like and dense SiC-SiO2 nanocomposite films synthesized by laser chemical vapor deposition using CO2 laser

► SiC nano-crystals embedded in amorphous SiO2 can be prepared using TEOS and C2H2. ► Laser irradiation enhances surface chemical reaction and film growth in CVD process. ► Dome-like deposits form at a low total pressure and high temperature conditions.