Annealing-induced amorphization in a sputtered glass-forming film: In-situ transmission electron microscopy observation

►Annealing-induced amorphization of sputtered Cu51Zr42Al4Ti3 film is clarified. ►The result is confirmed with in-situ TEM in conjunction with ex-situ AFM and XRD. ►Heated to 438 °C, the film becomes fully amorphous. ►The annealing-induced amorphization appear to be rather general.